JPH0338668Y2 - - Google Patents

Info

Publication number
JPH0338668Y2
JPH0338668Y2 JP1986173049U JP17304986U JPH0338668Y2 JP H0338668 Y2 JPH0338668 Y2 JP H0338668Y2 JP 1986173049 U JP1986173049 U JP 1986173049U JP 17304986 U JP17304986 U JP 17304986U JP H0338668 Y2 JPH0338668 Y2 JP H0338668Y2
Authority
JP
Japan
Prior art keywords
thin film
sensor
vacuum
substrate
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986173049U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6378230U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986173049U priority Critical patent/JPH0338668Y2/ja
Publication of JPS6378230U publication Critical patent/JPS6378230U/ja
Application granted granted Critical
Publication of JPH0338668Y2 publication Critical patent/JPH0338668Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP1986173049U 1986-11-10 1986-11-10 Expired JPH0338668Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986173049U JPH0338668Y2 (en]) 1986-11-10 1986-11-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986173049U JPH0338668Y2 (en]) 1986-11-10 1986-11-10

Publications (2)

Publication Number Publication Date
JPS6378230U JPS6378230U (en]) 1988-05-24
JPH0338668Y2 true JPH0338668Y2 (en]) 1991-08-15

Family

ID=31110149

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986173049U Expired JPH0338668Y2 (en]) 1986-11-10 1986-11-10

Country Status (1)

Country Link
JP (1) JPH0338668Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7322248B1 (en) * 2006-08-29 2008-01-29 Eastman Kodak Company Pressure gauge for organic materials

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61173043U (en]) * 1985-04-17 1986-10-28
JPS61240135A (ja) * 1985-04-17 1986-10-25 Yamatake Honeywell Co Ltd 真空計

Also Published As

Publication number Publication date
JPS6378230U (en]) 1988-05-24

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